Microstructure and Mechanical Properties of Sputter-Deposited Ti-Ni Alloy Thin Films

[+] Author and Article Information
A. Ishida

National Research Institute for Metals, Tsukuba, Ibaraki 305-0047, Japan

S. Miyazaki

Institute of Materials Science, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan

J. Eng. Mater. Technol 121(1), 2-8 (Jan 01, 1999) (7 pages) doi:10.1115/1.2815996 History: Received February 06, 1998; Revised July 15, 1998; Online November 27, 2007


The shape memory effect, superelasticity and two-way shape memory effect of Ni-rich Ti-Ni sputter-deposited thin films were evaluated quantitatively. The results indicated that they are almost comparable to those of bulk specimens. On the other hand, Ti-rich Ti-Ni thin films were found to exhibit a good shape memory behavior owing to a peculiar fine microstructure unlike bulk specimens. Addition of Cu or Pd to a Ti-50at.%Ni thin film was also confirmed to improve the shape memory behavior. These results suggest that shape memory thin films are a promising material for microactuators.

Copyright © 1999 by The American Society of Mechanical Engineers
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