A Cyclic Microbend Study on LIGA Ni Microelectromechanical Systems Thin Films

[+] Author and Article Information
J. Lou

Division of Engineering, Brown University, Providence, RI 02912 e-mail: Jun_Lou@brown.edu

P. Shrotriya

Division of Engineering, Brown University, Providence, RI 02912

W. O. Soboyejo

Princeton Materials Institute and Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, NJ 08544

J. Eng. Mater. Technol 127(1), 16-22 (Feb 22, 2005) (7 pages) doi:10.1115/1.1836767 History: Received January 01, 2003; Revised September 14, 2004; Online February 22, 2005
Copyright © 2005 by ASME
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Representative image of bent beam with thickness of 50 μm around tungsten fiber of 1 mm in diameter after: (a) first cycle, (b) tenth cycle, and (c) twentieth cycle
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Plots of normalized bending moment versus surface strain for all film thicknesses: (a) first cycle, (b) second cycle, (c) third cycle, and (d) fourth cycle
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The strain amplitude versus number of bending reversals for LIGA Ni thin film from cyclic microbending experiments
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Fatigue crack growth mechanisms revealed by typical fracture surface: (a) overview, (b) top surface, (c) bottom surface, and (d) final fracture regime
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Microstructure of as-received LIGA Ni sample plated from sulfamate bath: (a) cross-sectional optical micrograph, and (b) SEM image of top surface
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Cross-sectional orientation image of as-received LIGA Ni sample plated from sulfamate bath (color coding uses stereographic triangle legend in upper left-hand corner and is based on crystallographic orientation relative to deposition direction)
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Schematic illustration of the cyclic microbend experimental procedure: (a) initial configuration, (b) forward bent configuration, (c) final configuration due to elastic spring-back upon release of forward bent, (d) reverse bent configuration, (e) final configuration due to elastic spring-back upon release of reverse bent, and (f ) extraction of bending moment from curvature measurements



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