Crystalline defects other than the essential dislocations are produced by dislocation intersections resulting in debris, which can transform into loops, point defects, and∕or nanovoids. The stress concentrations ahead of slip clusters promote void formation leading to incipient cracks. To evaluate the progression of these processes during deformation, dynamic dislocation-defect analysis was applied to nominally pure aluminum, Al–Mg, and Al–Cu alloys. In the case of nanovoid formation, small angle X-ray scattering (SAXS) was used to quantitatively assess if the void size and its volume fraction can be determined to directly correlate with the measured thermodynamic response values. The SAXS signal from the nanovoids in nominally pure aluminum is distinctly measurable. On the other hand, thermomechanical processing of even nominally pure aluminum results in the formation of nanoprecipitates, which requires future calibration.