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  • Proceedings Article January 01, 2002

    Taher Saif; B. Erdem Alaca; Huseyin Sehitoglu

    Proc. ASME. 36428; Microelectromechanical Systems:83-85.January 01, 2002
    IMECE2002-33327
    doi: 10.1115/IMECE2002-33327