Effective Elastic Constants of Superlattice Films Measured by Line-Focus Acoustic Microscopy

[+] Author and Article Information
Jin O. Kim, Jan D. Achenbach

Center for Quality Engineering and Failure Prevention, Northwestern University, Evanston, Illinois 60208

Meenam Shinn, Scott A. Barnett

Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208

J. Eng. Mater. Technol 117(4), 395-401 (Oct 01, 1995) (7 pages) doi:10.1115/1.2804732 History: Received June 10, 1995; Online November 27, 2007


The effective elastic constants of single-crystal nitride superlattice films have been determined by calculation and by measurement methods. The calculation method uses formulas to calculate the effective elastic constants of superlattices from the measured elastic constants of the constituent layers. The calculated effective elastic constants are tested by comparing the corresponding surface acoustic wave (SAW) velocities calculated for thin-film/substrate systems with the corresponding SAW velocities measured by line-focus acoustic microscopy (LFAM). The measurement method determines the effective elastic constants of the superlattices directly from the SAW velocity dispersion data measured by LFAM. Two kinds of superlattice films are considered: one has relatively flat and sharp interfaces between layers, and the other has rough interfaces with interdiffusion. The calculation method has yielded very good results for the superlattices with flat and sharp interfaces but not for the superlattices with rough interfaces. The measurement method yields results for both kinds, with the restriction that the constituent layers have similar crystal symmetries.

Copyright © 1995 by The American Society of Mechanical Engineers
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