Many manufacturing processes, such as lithography, etching, laser, electrical discharge machining (EDM), and electrochemical machining (ECM), are being applied to produce the meso- and microscale parts and products. Materials such as silicon, glass, quartz crystal, and ceramics are being increasingly used in microelectromechanical system (MEMS) devices. Ultrasonic machining (USM) offers an attractive alternative to machine some of the hard and brittle materials. However, the tool wear in micro-ultrasonic machining adversely affects the machining accuracy. Therefore, it is necessary to account for and to compensate the tool wear during machining. This paper reports the feasibility of applying the uniform wear method developed for micro electrical discharge machining and its integration with CAD/CAM to microultrasonic vibration process for generating accurate three-dimensional (3D) microcavities. Experimental results show that the tool shape remains unchanged and the tool wear has been compensated.

Issue Section:
Technical Papers
Keywords:
Micromachining, Ultrasonic Machining, 3D Microshapes, ultrasonic machining, micromachining, drilling, tools, abrasion, CAD/CAM, mechanical engineering computing, electronics industry
Topics:
Computer-aided design, Machining, Wear, Ultrasonic machining, Drilling, Vibration, Shapes
1.
Taniguchi
,
N.
,
1983
, “
Current Status in, and Future Trends of Ultraprecision Machining and Ultrafine Material Processing
,”
CIRP Ann.
,
32
(
2
), pp.
573
–
582
.
2.
Masuzawa
,
T.
,
2000
, “
State of the Art of Micromachining
,”
CIRP Ann.
,
49
(
2
), pp.
473
–
488
.
3.
Zheng
,
W.
, and
Chen
,
S.
,
2000
, “
Micro-Manufacturing of a Nano-Liter-Scale, Continuous-Flow Polymerase Chain Reaction System
,”
Trans. NAMRI/SME
,
XXX
, pp.
551
–
555
.
4.
Shin
,
H.
,
Case
,
E. D.
, and
Kwon
,
P. Y.
,
2000
, “
Novel Powder Processing Techniques to Fabricate Efficient Meso-Scale Heat Exchanger
,”
Trans. NAMRI/SME
,
XXX
, pp.
671
–
679
.
5.
Ruska, W. S., 1987, Microelectronic Processing, McGraw-Hill, New York.
6.
Kovacs, G. T. A., 1998, Micromachined Transducers Sourcebook, McGraw-Hill, New York.
7.
van Zant, P., 1997, Microchip Fabrication, Third Edition, McGraw-Hill, New York.
8.
Berker
,
E. W.
,
Ehrfeld
,
W.
,
Hagmann
,
P.
,
Maner
,
A.
, and
Munchmeyer
,
D.
,
1986
, “
Fabrication of Micro-Structures With High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Molding (LIGA Process)
,”
Microelectron. Eng.
,
4
, pp.
35
–
56
.
9.
Brinksmeier, E., Preub, W., and Schmutz, J., 1997, “Manufacture of Microstructures by Diamond Machining,” Proc. of 9th IPES/UME 4 International Conference, pp. 503–507.
10.
Sawada, K., Takeuchi, Y., and Sato, T., 1998, “Improvement of Ultraprecision Micromachining Accuracy by Means of a High Precision Chuck System,” Proc. of CIRP International Seminar on Improving Machine Tool Performance, San Sebastian, Spain, pp. 599–606.
11.
Schuster
,
R.
,
Kirchner
,
V.
,
Allongue
,
P.
, and
Ertl
,
G.
,
2000
, “
Electrochemical Micromachining
,”
Science
,
289
, pp.
98
–
101
.
12.
Yu
,
Z. Y.
,
Masuzawa
,
T.
, and
Fujino
,
M.
,
1998
, “
Micro-EDM for Three Dimensional Cavities,—Development of Uniform Wear Method
,”
CIRP Ann.
,
47
(
1
), pp.
169
–
172
.
13.
Rajurkar
,
K. P.
, and
Yu
,
Z. Y.
,
2000
, “
3D Micro-EDM Using CAD/CAM
,”
CIRP Ann.
,
49
(
1
), pp.
127
–
130
.
14.
Meijer
,
J.
,
Du
,
K.
,
Gillner
,
A.
,
Hoffmann
,
D.
,
Kovalenko
,
V. S.
,
Masuzawa
,
T.
,
Ostendorf
,
A.
,
Poprawe
,
R.
, and
Schulz
,
W.
,
2002
, “
Laser Machining by Short and Ultrashort Pulses, State of the Art and New Opportunities in the Age of the Photons
,”
CIRP Ann.
,
51
(
2
), pp.
531
–
550
.
15.
Rajurkar, K. P., and Wang, W. M., 1997, “Nontraditional Machining,” CRC Handbook of Mechanical Engineering, CRC Press, Boca Raton, FL, Chapter 13, pp. 13/29–13/34.
16.
Snoeys
,
R.
,
Staelens
,
F.
, and
Dekeyser
,
W.
,
1986
, “
Current Trends in Non-Conventional Material Removal Processes
,”
CIRP Ann.
,
35
(
2
), pp.
467
–
479
.
17.
Egashira
,
K.
,
Masuzawa
,
T.
,
Fujino
,
M.
, and
Sun
,
X. O.
,
1997
, “
Application of USM to Micromachining by On-the-Machine Tool Fabrication
,”
Int. J. Elec. Machining
2
, pp.
31
–
36
.
18.
Sun, X. Q., Masuzawa, T., and Fujino, M., 1996, “Micro Ultrasonic Machining and Self-Aligned Multilayer Machining/Assembly Technologies for 3D Micromachines,” Proc. of Ninth Annual International Workshop on Micro ElectroMachanical Systems (MEMS’96), pp. 312–317.
19.
Egashira
,
K.
, and
Masuzawa
,
T.
,
1999
, “
Microultrasonic Machining by the Application of Workpiece Vibration
,”
CIRP Ann.
,
48
(
1
), pp.
131
–
134
.
20.
Gilmore, R., 1995, “Ultrasonic Machining and Polishing,” Proc. Int. Symposium for Electromachining, Lausanne, Switzerland, pp. 941–951.
21.
Thoe, T. B., Aspinwall, D. K., and Wise, M. L. H., 1995, “Review: Towards Ultrasonic Contour Machining,” Proc. Int. Symposium for Electromachining, pp. 953–962.
22.
Masuzawa
,
T.
,
Fijino
,
M.
, and
Kobayashi
,
K.
,
1985
, “
Wire Electrodischarge Grinding for Micromachining
,”
CIRP Ann.
,
34
(
1
), pp.
431
–
434
.
23.
Yu
,
Z. Y.
,
Masuzawa
,
T.
, and
Fujino
,
M.
,
1998
, “
3D Micro-EDM With Simple Shaped Electrode, Part 1: Machining of Cavities With Sharp Corners and Electrode Wear Compensation
,”
Int. J. Elec. Machining
3
, pp.
7
–
12
.
24.
Yu
,
Z. Y.
, and
Rajurkar
,
K. P.
,
2000
, “
Generation of Complex Micro Cavities by Micro EDM
,”
Trans. NAMRI/SME
,
XXX
, pp.
233
–
238
.
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